Wafer Size: 2” to 12”

Temperature Range: 0℃ - 1100 ℃ • Number of Temperature Points: 1-34” depends on wafer size

Temperature Accuracy: Class 1, ~0.4%

Sensor Type: K, R, S, PL II

Calibration: traceable to NIST, JEMIC

Feed Through: Polyimide flat cable with seal under chamber 

Connector Type: D, U, M, or none 

Lead Insulation: Polyimide, PFA Teflon, Silica Sleeve, Quartz Micro Tubes and others